Amptek Electron Probe X-Ray Analyzer (EPXA) Software for EDS/SEM Applications

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XRS-FP2 now has integrated analysis modes. Depending on the software options purchased XRS-FP2 can be run in XRF (bulk or multi-layer) mode or in EPXA mode. When running in EPXA mode the software is configured for spectra taken on a SEM fitted with an EDS detector. The software runs on standard PC’s and operating systems (Windows XP and later). Complete ZAF analysis is possible, with or without standards, using an internal database of fundamental parameters (FP) such as absorption coefficients, fluorescence yields, transition probabilities, etc. There is also an integrated spectrum display.
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